Shaped input for reducing crosstalk of two-axis MEMS scanners

Author:

Kim Kwanghyun,Kim Jinhwan,Park Yangkyu,Kim Sin-Ho,Lee Jong-Hyun

Funder

GIST

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference36 articles.

1. Closed-loop control of gimbal-less MEMS mirrors for increased bandwidth in LiDAR applications. Laser Radar Technology and Applications XXII;Milanović;Int. Soc. Opt. Photonics,2017

2. Dual-axis optical coherence tomography for deep tissue imaging;Zhao;Opt. Lett.,2017

3. Two-axis electrostatic gimbaled mirror scanner with self-aligned tilted stationary combs;Moon;IEEE Photonics Technol. Lett.,2016

4. A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process;Jun;J. Micromech. Microeng.,2014

5. Torsional MEMS scanner design for high-resolution scanning display systems. Optical Scanning 2002;Urey;Int. Soc. Opt. Photonics,2002

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