Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy-Reference-Cited by-同舟云学术

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Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy

Published:2022-01 Issue: Volume:188 Page:110373
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Gacka Ewelina,Kunicki Piotr,Sikora Andrzej,Bogdanowicz Robert,Ficek Mateusz,Gotszalk Teodor,Rangelow Ivo W.,Kwoka Krzysztof

Funder

Wroclaw University of Science and Technology

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference71 articles.

1. S. Koizumi, C. Nebel, M. Nesladek, eds., Physics and Applications of CVD Diamond, Wiley (2008). https://doi.org/10.1002/9783527623174.

2. High aspect ratio all diamond tips formed by focused ion beam for conducting atomic force microscopy;Olbrich;J. Vac. Sci. Technol. B Microelectron. Nanom. Struct.,1999

3. Micromachined ultrasharp silicon and diamond-coated silicon tip as a stable field-emission electron source and a scanning probe microscopy sensor with atomic sharpness;Rangelow;J. Vac. Sci. Technol. B Microelectron. Nanom. Struct.,1998

4. Preparation of ultrasharp diamond tip emitters by ion-beam etching;Stepanova;J. Vac. Sci. Technol. B Microelectron. Nanom. Struct.,1998

5. Spontaneous polarization model for surface orientation dependence of diamond hole accumulation layer and its transistor performance;Hirama;Appl. Phys. Lett.,2008

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