Measurement of stress characteristics in flexible multi-thin-film substrates using tomography common optical path interferometry
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Published:2024-09
Issue:
Volume:237
Page:115244
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ISSN:0263-2241
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Container-title:Measurement
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language:en
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Short-container-title:Measurement
Author:
Wen Bor-JiunnORCID,
Lee Che-Yu