Large-area thickness measurement of transparent multi-layer films based on laser confocal reflection sensor-Reference-Cited by-同舟云学术

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Large-area thickness measurement of transparent multi-layer films based on laser confocal reflection sensor

Published:2020-03 Issue: Volume:153 Page:107390
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Choi Young-Man,Yoo Hongki,Kang Dongwoo

Funder

Ajou University

National Research Council of Science & Technology

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference17 articles.

1. Preparation and properties of acrylic melamine hard coating;Nishino;J. Appl. Polym. Sci.,2012

2. Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2;Brand;Meas. Sci. Technol.,2011

3. Treasure of the Past VII: Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry;McCrackin;J. Res. Natl. Inst. Stand. Technol.,1963

4. Measurement of transparent plates with wavelength-tuned phase-shifting interferometry;De Groot;Appl. Opt.,2000

5. Thickness measurement of transparent plates by wavelength stepping and a phase unwrapping algorithm;Yu;Meas. Sci. Technol.,2013

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