Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2-Reference-Cited by-同舟云学术

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Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2

Published:2011-08-08 Issue:9 Volume:22 Page:094021
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Brand Uwe,Beckert Erik,Beutler Andreas,Dai Gaoliang,Stelzer Christian,Hertwig Andreas,Klapetek Petr,Koglin Jürgen,Thelen Richard,Tutsch Rainer

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/22/i=9/a=094021/pdf

Reference16 articles.

1. Polymer materials for microsystem technologies

2. Refractive index and extinction coefficient dependence of thin Al and Ir films on deposition technique and thickness

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