Error correction algorithm for grating Moiré fringes based on QM-ANN

Author:

Chang LiORCID,Lu Qiuyue,Guo Yumei,Zhou Bo,Xiu Guoyi

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference28 articles.

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2. Review of ultra-precision optical interferential encoder displacement measurement technology for immersion lithography scanner;Wang;Opt. Precis. Eng.,2019

3. Influence of installation error of grating interferometer on high-precision displacement measurement;Du;Opt. Eng.,2021

4. National IC industry development promotion outline, China IC, 23(2014) 14-16.

5. A high-precision planar grating displacement measurement;Wei;Laser J.,2020

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