The influence of the implantation sequence on the (SiC)1−x(AlN)x formation-Reference-Cited by-同舟云学术

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The influence of the implantation sequence on the (SiC)1−x(AlN)x formation

Published:2000-05 Issue: Volume:166-167 Page:758-763
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Pezoldt J.,Rybin P.V.,Kulikov D.V.,Trushin Yu.V.,Yankov R.A.,Voelskow M.,Kreissig U.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference28 articles.

1. Fabrication and characterization of SiC-AIN alloys

2. Composition and Properties of Hot-Pressed SiC-AIN Solid Solutions

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