Mechanisms of void coarsening in helium implanted silicon
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference38 articles.
1. Helium desorption/permeation from bubbles in silicon: A novel method of void production
2. On the permeation of hydrogen and helium in single crystal silicon and germanium at elevated temperatures
3. Cavity formation and impurity gettering in He-implanted Si
4. Hydrogen and helium bubbles in silicon
5. Voids in Silicon by He Implantation: From Basic to Applications
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