Factors determining energy values of ion beams for ion-beam deposition-Reference-Cited by-同舟云学术

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Factors determining energy values of ion beams for ion-beam deposition

Published:1999-01 Issue:1-4 Volume:148 Page:53-57
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Sakudo N,Hayashi K,Ikenaga N,Sakaguchi N,Moriike K,Fujimura K,Okada M,Maesaka T

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

1. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon

2. Formation of iron film by ion beam deposition

3. A dual source low-energy ion implantation system for use in silicon molecular beam epitaxy

4. A silicon MBE-compatible low-energy ion implanter

5. Exact energy values of ‘‘low‐energy ion beams’’

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion Beam Deposition and Cleaning;Low-Energy Ion Irradiation of Materials;2022

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