Author:
Belogorokhov A.I,Bublik V.T,Scherbachev K.D,Parkhomenko Yu.N,Makarov V.V,Danilin A.B
Subject
Instrumentation,Nuclear and High Energy Physics
Reference9 articles.
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4. Surface-Oriented Oxygen Mass Transport During Implantation
5. H.R. Huff, R.J. Krieger, Y. Takashi (Eds.), Semiconductor Silicon, Pennington, 1981, p. 126
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