Author:
Borun A. F.,Danilin A. B.,Mordkovich V. N.,Temper E. M.
Cited by
13 articles.
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1. Ion-beam synthesis of InSb nanocrystals in the buried SiO2 layer of a silicon-on-insulator structure;Semiconductors;2014-08-31
2. RADIATION DEFECT ENGINEERING;International Journal of High Speed Electronics and Systems;2005-03
3. Polyenergy ion beam synthesis of buried oxynitride layer in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-11
4. Behaviour of implanted oxygen and nitrogen in halogen lamp annealed silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-01
5. A phenomenological theory of ion‐beam synthesis of ternary compound in silicon;Journal of Applied Physics;1996-11