Simultaneous nuclear reaction analyses of boron and phosphorus in thin borophosphosilicate glass films using (α,p) reactions-Reference-Cited by-同舟云学术

Simultaneous nuclear reaction analyses of boron and phosphorus in thin borophosphosilicate glass films using (α,p) reactions

Published:2000-03 Issue: Volume:161-163 Page:629-634
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Walsh D.S,Doyle B.L

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference11 articles.

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2. Modified Phosphosilicate Glasses for VLSI Applications

3. K.J. Uram, J.K. Shugrue , N.P. Sandler, in: V.J. Kapoor, W.D. Brown (Eds.), Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Dielectric Science and Technology and Electronics Divisions Proceedings, vol. 94–16, The Electrochemical Society, 1994

4. Improvement in depth resolution of medium-mass element analysis: Application to biocompatible glasses

5. Depth profiling of phosphorus using resonances in the reaction

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