Thin film oxides as probe for homogeneity measurements of 3-dimensional objects treated by plasma immersion ion implantation

Author:

Ensinger W,Volz K

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Plasma-based biofunctionalization of vascular implants;Nanomedicine;2012-12

2. Plasma immersion ion implantation of industrial gears;Surface and Coatings Technology;2004-08

3. Properties of hydrogenated amorphous carbon thin films deposited by plasma-based ion implantation method;Diamond and Related Materials;2004-04

4. Treatment homogeneity and conformal analysis of plasma based ion implanted 3D target;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-04

5. Modelling and experiment of plasma-based ion-implanted two-dimensional target;Modelling and Simulation in Materials Science and Engineering;2004-01-07

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