Low energy ion assist during deposition — an effective tool for controlling thin film microstructure
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference34 articles.
1. Hand-book of Ion Beam Processing and Technology,1989
2. Fundamentals of ion-beam-assisted deposition: Technique and film properties
3. Use of ion beam assisted deposition to modify the microstructure and properties of thin films
4. Ion beam assisted thin film deposition
5. Surface Modification Technologies VI;Emmerich,1993
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