Plasma immersion ion implantation of pure aluminium at elevated temperatures-Reference-Cited by-同舟云学术

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Plasma immersion ion implantation of pure aluminium at elevated temperatures

Published:1997-05 Issue: Volume:127-128 Page:873-878
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Blawert C.,Mordike B.L.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference28 articles.

1. Kinetics and Mechanism of Plasma Nitridation of Thin Aluminium Films

2. Formation of aluminum nitride by intensified plasma ion nitriding

3. Plasma-assisted nitriding of aluminum

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