The density effects in sputtering of amorphous materials
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference42 articles.
1. II. The energy spectrum of ejected atoms during the high energy sputtering of gold
2. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
3. Energy distributions of atoms sputtered from polycrystalline surfaces
4. Sputtering theory
5. Mechanisms and theory of physical sputtering by particle impact
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