Microstructural changes in silicon thermal oxide induced by high-flux copper negative-ion implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. Negative-ion implantation technique
2. Self-assembled two-dimensional distribution of nanoparticles with high-current Cu− implantation into insulators
3. Metal nanocrystal formation in magnesium aluminate spinel and silicon dioxide with high-flux Cu− ions
4. Linear and nonlinear optical properties of Cu nanoparticles fabricated by high-current Cu− implantation in silica glass
5. Coulomb blockade in Sb nanocrystals formed in thin, thermally grown SiO2 layers by low-energy ion implantation
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1. Thermal evolution and optical properties of Cu nanoparticles in SiO2 by ion implantation;Optical Materials;2011-01
2. Effects of high-fluence ion implantation on colorless diamond self-standing films;Journal of Applied Physics;2008-09-15
3. Structural and optical properties of Cu nanoparticles embedded in Si3N4/Si by ion implantation;Optical Materials;2008-05
4. TEM characterization of Au nano-particles in TiO2 single crystals by ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-01
5. Near-surface sensitive infrared reflection spectroscopy on SiO2 implanted with high-flux negative ions;Vacuum;2004-06
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