Chemical and electrochemical anisotropic dissolution of silicon in ethylenediamine + pyrocatechol + water media
Author:
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering,Analytical Chemistry
Reference52 articles.
1. A Water-Amine-Complexing Agent System for Etching Silicon
2. Study of the Orientation Dependent Etching and Initial Anodization of Si in Aqueous KOH
3. The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions
4. Ellipsometric Study of Orientation‐Dependent Etching of Silicon in Aqueous KOH
5. Fabrication of novel three-dimensional microstructures by the anisotropic etching of
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