Influence of the electrolyte composition and pH on the anodic dissolution of p-type Si in aqueous HF solutions
Author:
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering,Analytical Chemistry
Reference28 articles.
1. SOI technology using buried layers of oxidized porous Si
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3. Electrochemical Investigation into the Dissolution Mechanism of Anodic Oxide Films on Silicon;MRS Proceedings;2013
4. Galvanic Corrosion Suppression of High-k/Metal Gates Using Organic Solvent-Based Hydrogen Fluoride;Japanese Journal of Applied Physics;2008-04-25
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