Author:
Shichang Zou,Genqing Yang
Reference21 articles.
1. Synthesis of titanium nitride films by ion-beam- enhanced-deposition
2. D.W.You, et al., Proc. of the 7th Chinese Symposium on electrons, Ions and Laser beam Technologies, (Suzou, 1993) 192
3. Properties and structure of silicon nitride films synthesized by ion-beam-enhanced deposition
4. Y.S.Chen, et al., Proc. of The Fifth Sino-Japan Symposium on Ion Beam Optimization of Materials (Shanghai, 1992) 75