Synthesis of titanium nitride films by ion-beam- enhanced-deposition-Reference-Cited by-同舟云学术

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Synthesis of titanium nitride films by ion-beam- enhanced-deposition

Published:1991-07 Issue:2 Volume:202 Page:315-320
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Wang Xi,Liu Xianghuai,Chen Youshan,Yang Genqing,Zhou Zuyao,Zheng Zhihong,Huang Wei,Zou Shichang

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Ion-Beam-Assisted Deposition and Synthesis

2. Adherent TiN films produced by ion beam enhanced deposition at room temperature

3. Titanium Nitride Crystal Growth with Preferred Orientation by Dynamic Mixing Method

4. Coating Films of Titanium Nitride Prepared by Ion and Vapor Deposition Method

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication and characterization of a new automotive air-to-fuel sensors based on Pt- and TiO2-doped Nb2O5 film deposited by IBED1Paper presented at the 2nd East Asia Conference on Chemical Sensors, Xi’an, P.R. China, 1995.1;Sensors and Actuators B: Chemical;1998-05

2. High energy xenon ion beam assisted deposition of TiN film and its industrial application;Journal of Materials Science;1996-01

3. Phases and structures of nanocrystalline TiN films;Journal of Applied Physics;1995-04

4. Structure of TiNx (0 < x < 1.1) films prepared by ion beam-assisted deposition;Thin Solid Films;1995-03

5. ION BEAM RESEARCH IN CHINA;Laser and Ion Beam Modification of Materials;1994

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