Low-Energy Ion/Surface Interactions During Crystal Growth from the Vapor Phase: Effects on Nucleation and Growth, Defect Creation and Annihilation, Microstructure Evolution, and Synthesis of Metastable Phases-Reference-Cited by-同舟云学术

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Low-Energy Ion/Surface Interactions During Crystal Growth from the Vapor Phase: Effects on Nucleation and Growth, Defect Creation and Annihilation, Microstructure Evolution, and Synthesis of Metastable Phases

Published:1993 Issue: Volume: Page:639-681
ISSN:
Container-title:Fundamentals
language:
Short-container-title:

Author:

GREENE J.E.

Publisher

Elsevier

Reference135 articles.

1. Atomic layer epitaxy

2. Mechanisms and kinetics of Si atomic‐layer epitaxy on Si(001)2×1 from Si2H6

3. The role of ion/surface interactions and photo-induced reactions during film growth from the vapor phase

4. Thin Film Processes II;Eden,1991

5. Nucleation and growth of thin films

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