Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Cited by
16 articles.
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1. SOI Materials;Silicon-on-Insulator Technology: Materials to VLSI;1997
2. Recent progress in bipolar transistor technology;IEEE Transactions on Electron Devices;1995-03
3. NMOS device characteristics in electron-beam-recrystallized SOI;IEEE Transactions on Electron Devices;1993-07
4. SOI Materials;Silicon-on-Insulator Technology;1991
5. Formation of silicon-on-insulator layers by electron beam recrystallization;Microelectronic Engineering;1988-12