Large area recrystallization of polysilicon with tungsten-halogen lamps-Reference-Cited by-同舟云学术

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Large area recrystallization of polysilicon with tungsten-halogen lamps

Published:1983-10 Issue:3 Volume:63 Page:484-492
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Robinson McD.,Lischner D.J.,Celler G.K.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference19 articles.

1. Laser and Electron Beam Interactions with Solids,1982

2. Laser-Solid Interactions and Transient Thermal Processing of Materials,1983

3. Migration on fine molten wires in thin silicon wafers

4. Seeded recrystallization of thick polysilicon films on oxidized 3‐in. wafers

5. Laser-Solid Interactions and Transient Thermal Processing of Materials;Celler,1983

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Growth of polycrystalline-silicon thin films on glass;Journal of Materials Science: Materials in Electronics;1994-10

2. Investigation of polycrystalline silicon deposition on glass substrates;Solar Energy Materials and Solar Cells;1993-10

3. A Simple Method for Obtaining the Power Distribution Yielding a Desired Temperature Distribution in Zone-Melting Recrystallization;Japanese Journal of Applied Physics;1992-10-15

4. Other Approaches to Oriented Crystallization on Amorphous Substrates;Oriented Crystallization on Amorphous Substrates;1991

5. Interconnect Issues;The Kluwer International Series in Engineering and Computer Science;1989

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