Silicon-on-insulator by oxygen ion implantation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference25 articles.
1. Formation of SiO2Films by Oxygen-Ion Bombardment
2. Isolating surface layers on metallic conductors produced by ion bombardment
3. Thin SiO2 films formed by oxygen ion implantation in silicon: Electron microscope investigations of the Si-SiO2 interface structures and their c-v characteristics
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