The pyrolysis of trimethylgallium on a heated Si(100) substrate
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference17 articles.
1. Trimethylgallium Decomposition on Si(100)
2. Decomposition of trimethylgallium on Si(100): Spectroscopic identification of the intermediates
3. The Decomposition of Trimethylgallium and Trimethylaluminum on Si(100)
4. Surface reactions of trimethylgallium and trimethylarsenic on silicon surfaces
5. Understanding of surface chemistry of III–V metalorganic chemical vapor deposition reactants
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1. Effect of post-deposition annealing on low temperature metalorganic chemical vapor deposited gallium oxide related materials;Journal of Crystal Growth;2017-06
2. A quantum chemical study on gas phase decomposition pathways of triethylgallane (TEG, Ga(C2H5)3) and tert-butylphosphine (TBP, PH2(t-C4H9)) under MOVPE conditions;Phys. Chem. Chem. Phys.;2014
3. Gallium Assisted PECVD Synthesis of Silicon Nanowires;ECS Transactions;2010-10-08
4. Epitaxial growth of Si nanowires by a modified VLS method using molten Ga as growth assistant;MRS Proceedings;2008
5. Breaking the Ga–CH3 bond at cryogenic temperatures using atomic hydrogen. Adsorbed trimethylgallium reactivity;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-05
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