Correlation between temperature and impurity concentration fluctuations in silicon crystals grown by the Czochralski method
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference12 articles.
1. Crystal Growth and Segregation under Zero Gravity: Ge
2. The effect of temperature oscillations at the growth interface on crystal perfection
3. Über die Entstehung von Inhomogenitäten in Halbleiter-Kristallen bei der Herstellung aus Schmelzen;Müller,1986
4. Appearance of a baroclinic wave in Czochralski silicon melt
5. Experimental observation and numerical simulation of wave patterns in a Czochralski silicon melt
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2. The influence mechanism of melt flow instability on the temperature fluctuation on the crystal/melt interface during Czochralski silicon crystal growth;International Journal of Heat and Mass Transfer;2019-10
3. Silicon Crystallization Technologies;Semiconductors and Semimetals;2015
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