The influence mechanism of melt flow instability on the temperature fluctuation on the crystal/melt interface during Czochralski silicon crystal growth
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics
Reference35 articles.
1. Growth of 450mm diameter semiconductor grade silicon crystals;Lu;J. Cryst. Growth,2001
2. Thermal stress induced void formation during 450 mm defect free silicon crystal growth and implications for wafer inspection;Kamiyama;Appl. Phys. Lett.,2013
3. Experimental investigation on the effect of crystal and crucible rotation on thermocapillary convection in a Czochralski configuration;Shen;Int. J. Therm. Sci.,2016
4. Convective phenomena in large melts including magnetic fields;Muiznieks;J. Cryst. Growth,2007
5. Large-eddy simulation of melt turbulence in a 300-mm Cz–Si crystal growth;Liu;Int. J. Heat Mass Transf.,2012
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