Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference3 articles.
1. International Technology Roadmap of Standard of Semiconductors 2009 edition, ITRS, 2009, Introduction, p. 13.
2. ISMI 450mm Transition Program Status Update for ITRS IRC, ISMI Symposium, Seoul, 2008.
3. Growth of silicon crystal with a diameter of 400mm and weight of 400kg
Cited by
15 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献