Origins of metal impurities in single-crystal Czochralski silicon-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Origins of metal impurities in single-crystal Czochralski silicon

Published:1995-09 Issue:1-2 Volume:154 Page:47-53
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Harada K.,Tanaka H.,Matsubara J.,Shimanuki Y.,Furuya H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference5 articles.

1. The 6th Symposium of Japan-China Science and Technology Exchange Association at Gakushuin University in Japan;Furuya,1993

2. S.F. Yokota, H. Yamagishi and T. Abe, in: Extended Abstracts of the 36th Spring Meeting of Japan Society of Applied Physics and Related Societies, Chiba 2p-ZP-2.

3. W. Zulehner and D. Huber, Crystals 8, Czochralski-Grown Silicon, p. 28.

4. H. Furuya, M. Kida and Y. Shimanuki, private communication.

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Silicon Properties and Crystal Growth;Silicon Sensors and Actuators;2022

2. Development of the ReaxFF Reactive Force Field for Cu/Si Systems with Application to Copper Cluster Formation during Cu Diffusion Inside Silicon;The Journal of Physical Chemistry C;2021-08-30

3. Properties of silicon crystals;Handbook of Silicon Based MEMS Materials and Technologies;2020

4. Source of Metals in Si and Ge Crystal Growth and Processing;Metal Impurities in Silicon- and Germanium-Based Technologies;2018

5. Properties of Silicon Crystals;Handbook of Silicon Based MEMS Materials and Technologies;2015

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP