Growth pressure dependence of selective area metalorganic vapor phase epitaxy on planar patterned substrates
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference11 articles.
1. A theory for metalorganic vapor phase epitaxial selective growth on planar patterned substrates
2. Selective-area low-pressure MOCVD of GaInAsP and related materials on planar InP substrates
3. Selective and non-planar epitaxy of InP/GaInAs(P) by MOCVD
4. IPRM;Sasaki,1993
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