Morphological properties of chemical vapour deposited AlN films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference30 articles.
1. Prospects for device implementation of wide band gap semiconductors
2. Growth morphology and surface‐acoustic‐wave measurements of AIN films on sapphire
3. Preferred orientation of AlN plates prepared by chemical vapour deposition of AlCl3 + NH3 system
4. Crystal structure refinement of AlN and GaN
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