Author:
Coon P.A.,Wise M.L.,George S.M.
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference61 articles.
1. Silicon Processing for the VLSI Era;Wolf,1986
2. VLSI Technology;Pearce,1988
3. VLSI Fabrication Principles;Ghandhi,1983
4. Rate-determining reactions and surface species in CVD of silicon
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