Gas phase monitoring of reactions under InP MOVPE growth conditions for the decomposition of tertiarybutyl phosphine and related precursors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference8 articles.
1. MOCVD grown InP/InGaAs structures for optical receivers
2. High‐purity InP layer grown by metalorganic chemical vapor deposition using tertiarybutylphosphine
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4. THE PYROLYSIS OF TRIMETHYLINDIUM
5. Elucidation of the organometallic vapor phase epitaxial growth mechanism for InP
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