Étude de l'épitaxie localisée du GaAs
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference10 articles.
1. Selective Epitaxial Deposition of Gallium Arsenide in Holes
2. Effects of Vapor Composition on the Growth Rates of Faceted Gallium Arsenide Hole Deposits
3. Anisotropy in Etching and Deposition of Selective Epitaxial Growth of GaAs
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1. Generalized simulator for vapor phase epitaxy on patterned substrates;Journal of Crystal Growth;1995-09
2. Selective epitaxy of compound semiconductors: novel sources;Semiconductor Science and Technology;1993-06-02
3. Selective growth of GaAs and GaAlAs by Cl-assisted OMVPE at atmospheric pressure;Journal of Electronic Materials;1992-03
4. Evolution of 3D growth patterns on nonplanar substrates;Journal of Crystal Growth;1991-12
5. Selective growth of GaAs by organometallic vapor phase epitaxy at atmospheric pressure;Applied Physics Letters;1991-01-14
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