Kinetics of homogeneous decomposition of silane
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference39 articles.
1. Influence of AsH[sub 3], PH[sub 3],and B[sub 2]H[sub 6] on the Growth Rate and Resistivity of Polycrystalline Silicon Films Deposited from a SiH[sub 4]-H[sub 2] Mixture
2. Kinetics of Silicon Growth under Low Hydrogen Pressure
3. Kinetics of the silane and silylene decompositions under shock tube conditions
4. Polysilicon growth kinetics in a low pressure chemical vapour deposition reactor
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