Simulation of carbon doping of GaAs during MOVPE
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference45 articles.
1. Thin Film Processes - II;Kuech,1991
2. The influence of hydrocarbons in MOVPE GaAs growth: Improved detection of carbon by secondary ion mass spectroscopy
3. Controlled carbon doping of GaAs by metalorganic vapor phase epitaxy
4. Gas‐Phase and Surface Reaction Mechanisms in MOCVD of GaAs with Trimethyl‐Gallium and Arsine
5. Detailed models of the MOVPE process
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