Silicon doping using disilane in low-pressure OMVPE of GaAs
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference30 articles.
1. A New Method for Growing GaAs Epilayers by Low Pressure Organometallics
2. Reduced pressure MOVPE growth and characterization of GaAs/GaAlAs heterostructures using a triethylgallium source
3. Epitaxial Growth of High-Purity GaAs by Low-Pressure MOCVD
4. Selective epitaxial growth of GaAs by low-pressure MOVPE
5. Selective Embedded Growth of AlxGa1-xAs by Low-Pressure Organometallic Vapor Phase Epitaxy
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