Numerical study of the influence of reactor design on MOCVD with a comparison to experimental data
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference30 articles.
1. Micro-reaction engineering applications of reaction engineering to processing of electronic and photonic materials
2. Chemical Vapor Deposition: A Chemical Engineering Perspective
3. Metalorganic Chemical Vapor Deposition
4. Complex flow phenomena in MOCVD reactors
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