Step-density dependence of growth rate on vicinal surface of MOCVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference11 articles.
1. Organometallic VaporPhase Epitaxy;Stringfellow,1989
2. Anisotropic lateral growth in GaAs MOCVD layers on (001) substrates
3. Orientation dependence of GaAs growth in low-pressure OMVPE
4. (AlAs)1/2(GaAs)1/2 fractional-layer superlattices grown on (001) vicinal GaAs substrates by metal–organic chemical vapor deposition
5. Molecular-beam epitaxy growth of tilted GaAs/AlAs superlattices by deposition of fractional monolayers on vicinal (001) substrates
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