Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference38 articles.
1. Metal-organic vapor phase epitaxy of compound semiconductors
2. Transport phenomena and chemical reaction issues in OMVPE of compound semiconductors
3. Hydrodynamic dispersion in rotating-disk omvpe reactors: Numerical simulation and experimental measurements
4. Complex flow phenomena in vertical MOCVD reactors: Effects on deposition uniformity and interface abruptness
5. Flow visualization studies for optimization of OMVPE reactor design
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