Oxygen transport in magnetic czochralski growth of silicon with a non-uniform magnetic field-Reference-Cited by-同舟云学术

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Oxygen transport in magnetic czochralski growth of silicon with a non-uniform magnetic field

Published:1989-01 Issue:1 Volume:94 Page:213-228
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Hicks T.W.,Organ A.E.,Riley N.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference6 articles.

1. Oxygen transport in magnetic Czochralski growth of silicon

2. Electricity;Coulson,1951

3. R.W. Series, private communication.

4. VLSI Science and Technology 1985;Harada,1985

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