Semi-insulating polysilicon (SIPOS) deposition in a low pressure CVD reactor
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference30 articles.
1. Semi-Insulating Polycrystalline-Silicon (SIPOS) Passivation Technology
2. Semi-Insulating Polycrystalline-Silicon (SIPOS) Films Applied to MOS Integrated Circuits
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4. Proc. 14th Intern. Conf. on Physics of Semiconductors;Goodman,1978
5. Oxygen Determination in SIPOS Using a Differential Thickness Measurement
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