Integrated-optical acoustical sensors-Reference-Cited by-同舟云学术

Integrated-optical acoustical sensors

Published:1994-04 Issue:1-3 Volume:41 Page:93-97
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Pliska P.,Lukosz W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. New nanomechano-integrated optical devices as modulators, switches, and microphones; integrated optical (bio-)chemical sensors;Lukosz,1990

2. Integrated optical nanomechanical devices as modulators, switches, and tunable frequency filters, and as acoustical sensors;Lukosz;SPIE Proc.,1992

3. Nanomechano-grating-coupler-modulator and integrated optical microphone;Lukosz;SPIE Proc.,1989

4. Integrated optical interferometer as a light modulator and microphone;Lukosz;Sensors and Actuators A,1991

5. Integrated optical nanomechanical light modulators and microphones;Lukosz;Sensors Mater.,1992

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review;Journal of Semiconductors;2022-08-01

2. Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review;Micromachines;2016-01-25

3. Chemical Sensor Based on Thin Film Optical Planar Waveguide;43rd AIAA Aerospace Sciences Meeting and Exhibit;2005-01-10

4. Optical fiber interferometer for measuring the in situ deflection characteristics of microelectromechanical structures;Optical Engineering;2003-01-01

5. Single-arm double-mode double-order planar waveguide interferometric sensor;Applied Optics;2001-01-20