Fabrication of microchannels by laser machining and anisotropic etching of silicon-Reference-Cited by-同舟云学术

Fabrication of microchannels by laser machining and anisotropic etching of silicon

Published:1992-04 Issue:1-3 Volume:32 Page:299-302
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Alavi M.,Büttgenbach S.,Schumacher A.,Wagner H.-J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Lasers in microelectronics;Pothoven;Ind. Laser. Rev.,1990

2. Anisotropic laser etching of oxidized (100) silicon;Arnone;Appl. Phys. Lett.,1989

3. Laser enhanced etching in KOH;von Gutfeld;Appl. Phys. Lett.,1982

4. Deep narrow vertical-walled shafts in <110 > -silicon;Barth;Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, USA,11141985

5. Laser machining of silicon for fabrication of new microstructures;Alavi;Proc, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA,23271991

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