Laser enhanced etching in KOH
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93069
Reference8 articles.
1. Infrared laser induced reaction of SF6 with silicon surfaces
2. Multiple photon excited SF6 interaction with silicon surfaces
3. Laser‐photoinduced etching of semiconductors and metals
4. Laser chemical technique for rapid direct writing of surface relief in silicon
5. Laser enhanced electroplating and maskless pattern generation
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