Author:
Dziuban J.A.,Gorecka-Drzazga A.,Lipowicz U.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Silicon in mechanical sensors;Greenwood;J. Phys. E: Sci. Instrum.,1988
2. Silicon as a mechanical material;Petersen;Proc. IEEE,1982
3. Optothermal drive of silicon resonators: the influence of surface coating;Pitcher;Sensors and Actuators,1990
4. Excitation of silicon microresonators using short optical pulses;Zhang;Sensors and Actuators,1990
Cited by
12 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献