Author:
Graf E.,Kronast W.,Dühring S.,Müller B.,Stoffel A.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. A silicon condenser microphone with a highly perforated backplate;Bergqvist;Transducers '91, Dig. Tech. Pap., IEEE,1991
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21 articles.
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