Maximizing microelectromechanical sensor and actuator sensitivity by optimizing geometry-Reference-Cited by-同舟云学术

Maximizing microelectromechanical sensor and actuator sensitivity by optimizing geometry

Published:1995-09 Issue:3 Volume:50 Page:223-236
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Haronian Dan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

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4. K.A. Shaw, S.G. Adams and N.C. MacDonald, A single-mask lateral accelerometer, Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93) Yokohama, Japan, 9–12 June, 1993, pp. 210–213

5. A study on field-emission array pressure sensors;Lee;Sensors and Actuators A,1992

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