Author:
Burrer Chr.,Esteve J.,Plaza J.A.,Bao M.,Ruiz O.,Samitier J.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. Analytical and FEM modelling of piezoresistive silicon accelerometers: predictions and limitations compared to experiments;Tschan;Sensors Mater,1992
5. TMAH/IPA anisotropic etching characteristics;Merlos;Sensors and Actuators A,1993
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